Investigation of Si-based thin films on their resistive memory properties
碩士 === 國立高雄應用科技大學 === 電子工程系 === 99 === Abstract In this thesis, SiO2 and Si3N4 thin films were deposited on Pt/Ti/SiO2/Si substrates by a radio-frequency magnetron sputter and high density plasma chemical vapor deposition (HDPCVD), respectively. Then, Cu/SiO2/Pt and Cu/Si3N4/Pt structures were fabri...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
100
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05159395276062662881 |