| Summary: | 碩士 === 輔仁大學 === 物理學系 === 99 === The purposes of this studyis to reduce the energy gap of TiO2 films by doping nitrogen, so that the films can still have phtocatalytic effect in visible light.
This experiment consists of two parts. At the first part, we deposit TiO2 film by arc ion plating to understand its general characteristic. At the same time ,we observe the films surface structure by Electron Microscope(SEM) and Atomic Force Microscope(AFM) and find the best ellipsometry model to fit Optical constant. And then we use different nitrogen pressure to deposit the N-doped TiO2 films and fitting by the best ellipsometry model. Research the relationship between nitrogen pressure and optic characteristic. The results show that index of refraction and deposition rate increase as the flux of nitrogen increases, but index of refraction turn down when the nitrogen pressure is 4.4×10-3 torr.
At the second part, we research the energy gap of film, phtocatalytic effect and binding . Because all the film in this research are amorphous, we use the ellipsometry TL-model fitting band gap. The results show that when the flux of nitrogen increases, the energy gap is gradually narrowing, but it will turn up when nitrogen pressure up to3.0x10-3torr. Besides, we proved the accordingly by photocatalyst Methylene Blue test, and when the above-mentioned happened, the N-doped TiO2 films binding had been changed. We can also evidence the change with XPS.
In conclusion, we have been narrowed the original TiO2 film energy gap effectively, and confirmed the phtocatalytic effect through Methylene Blue test in this research.
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