Properties of Transparent Conductive Films of Various Dopped Aluminum Zinc Oxide Deposited by Ion Beam Sputtering
碩士 === 輔仁大學 === 物理學系 === 99 === In this study, aluminum doped zinc oxide (AZO) films fabricated on the area of the glass substrate of 1.3 cm2 by the ion beam co-sputtering deposition at room temperature was investigated. The first part of experiment for various composition of AZO films were controll...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91730040481396126009 |