Photocatalytic Properties Of Carbon/Nitrogen-Doped Titanium Oxide Films Prepared by Ion-Beam Assisted RF Magnetron Sputtering Deposition

• Main Authors: Lee,JengYu, 李政諭
• Other Authors: Hsu,Jin-Cherng
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/33157966912876511463

碩士 === 輔仁大學 === 物理學系 === 99 === 　　Carbon/nitrogen-doped titanium oxide films were prepared by ion-beam assisted RF magnetron sputtering deposition. We want to extend the absorption edge of titanium oxide from UV region to visible light region , enhance the function of C/N-doped TiO2 films. 　　The anatase of carbon/nitrogen-doped titanium oxide were prepared at substrate temperature 500℃ in plasmas of CO2 and N2 mixture .The prepared samples were characterized by a series of analytical methods including UV-Vis spectrophotometer , atomic force microscope，X-ray diffraction , X-ray photoelectron spectroscopy and Methylene blue degradation , which to measure the optical properties and band gap , morphology , crystallinity ,bonding and photocatalyst. 　　In the XPS analysis, there are β-N bonding and C-N bonding in the film , it affects narrowing the band gap of titanium oxide. The XRD analysis found the crystallinity will become weak in the N2 process, and in the CO2 process, the anatase was induced to rutile. In the decompose methylene blue experiment , the C/N-TiO2 film with the IAD exhibits the best visible light(460 nm) photocatalytic activity . The band gap of C/N-TiO2 film was narrowing from 3.2eVto 2.69eV. It was demonstrated in this study that the process is useful to reduce the band gap and enhance the photocatalytic property.