Wire Tension Analysis for Wiresaw
碩士 === 逢甲大學 === 自動控制工程所 === 99 === In the semiconductor and solar energy industries, the wafer production capacity and yield rate are very important. Owing to that wafer nowadays is produced by using muti-wire saw machine to slice silicon ingot, therefore muti-wire saw machine plays an important rol...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95390786208502426189 |