Gas Microsensors Based on Nanoporous Anodic Aluminum Oxide

Gas Microsensors Based on Nanoporous Anodic Aluminum Oxide

碩士 === 逢甲大學 === 自動控制工程所 === 99 === A novel CO gas microsensor with tungsten oxide (WO3) sensing film on nanoporous anodic aluminum oxide (AAO) layer has been performed on anodic aluminum oxide template at operation temperature of 25 ℃. Based on microelectromechanical system (MEMS) technology, the mi...

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Bibliographic Details
Main Authors:	Tze-chun Liu, 劉澤鈞
Other Authors:	Hsing-cheng Chang
Format:	Others
Language:	zh-TW
Published:	2011
Online Access:	http://ndltd.ncl.edu.tw/handle/29622697040391545281

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