Gas Microsensors Based on Nanoporous Anodic Aluminum Oxide
碩士 === 逢甲大學 === 自動控制工程所 === 99 === A novel CO gas microsensor with tungsten oxide (WO3) sensing film on nanoporous anodic aluminum oxide (AAO) layer has been performed on anodic aluminum oxide template at operation temperature of 25 ℃. Based on microelectromechanical system (MEMS) technology, the mi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29622697040391545281 |