Using fuzzy law and voltage magnitude regulated to control a X-Y piezoelectric actuated stage
碩士 === 清雲科技大學 === 電機工程所 === 99 === Design and fabricate piezoelectric actuators as foundation to position stage system in this research thesis. We plan to adopt t piezoelectric actuators developed by us as actuating elements to drive X-Y table. The mechanical design of piezoelectric actuators as wel...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06072385524742536629 |