Status Analyses on Energy Conservation Technologies for High-Tech Fab of Taiwan

• Main Authors: Hung-Te Sun, 孫鴻德
• Other Authors: Shi-Lin Chen
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/81491612322724595310

碩士 === 中原大學 === 電機工程研究所 === 99 === Abstract High-tech Fab energy use grand, a 12-inch Foundry Fab contract capacity of about 60 ~ 120 MW, a 8.5-generation TFT Fab contract capacity is about 100 ~ 150MW, equivalent to a small town with electricity, Fab facility, each machine processes 55%, 45% of the electricity; shall be divided into four parts to explore. 1 Facility system and Energy conservation, and air conditioning, electricity, compressed air and other energy saving technologies and energy efficiency principles to be explored, including air conditioning of the air side, water side energy conservation measures; electricity power factor compensation, reducing line losses, the efficiency of lighting upgrade; Air inlet temperature reduction, multi-machine control chain analysis. 2 Both set up Fab's energy status, including the replacement of less efficient air-conditioning, lighting equipment, UPS economic operation mode, air conditioning, water side of the operation optimization ESCO importing and energy-saving performance testing energy saving improvement analysis, process equipment, machine operation rate and capacity operation with optimal efficiency to explore. And to perform the case in recent years are described. 3 The new Fab's green energy plan, and the U.S. LEED & Taiwan EEWH Green Building Rating System and how the differences between two planning and import, including the building shell, air conditioning system, lighting system energy saving, Facility and the best mode of supply, high efficiency energy saving equipment selection, use of green energy and low energy consumption equipment. And Taiwan in recent years with award winning classic case of a description. 4 The blue chip companies implement energy saving case for energy conservation technology to collect, classify, archive their implementation of improved energy efficiency measures, to summarize, discuss, and identify special practices and technologies of the future plant's energy executive direction, in order to achieve long-term sustainable development of enterprises goals