| Summary: | 碩士 === 中原大學 === 化學研究所 === 99 === In this study, indium tin oxide (ITO) thin film were deposited on the glass by DC magnetron sputtering. We studied the thin-film properties of ITO that have a thin-film thickness of 15nm~175nm, transmittance, resistivity, the intervention effect and the heating effect of current. This study also examines the annealing to decrease resistivity and uses the Sessile Drop to determine hydrophobic and hydrophilic properties on the surface of ITO glass. Indium tin oxide is a transparent conducting thin film that has a highly visible transmission and low resistivity. ITO substrates were usually the conductive electrode of the display. In the touch panel applications, the transparent conductivity oxide (TCO) film requires high resistivity the TCO film should be thin; however, this has many
disadvantages, including non-uniform resistivity.
Experiments results demonstrate that the ITO thickness of 15nm has 91% transmittance and resistivity 2.81×10-4(Ω-cm). The uniform resistivity of the ITO substrates edge is also good under annealing temperature 290oC
process condition.
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