Design and application of the Piezoelectric dome thin-film sensor
碩士 === 國立中正大學 === 機械系 === 99 === This paper presents a micro-fabrication method to make a dome-shaped-diaphragm transducer (DSDT) about 50 MHz frequency. The DSDT uses piezoelectric PZT film to generate acoustic waves, and is fabricated on a silicon substrate. It is followed by applying wax to the m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04868601576868571148 |