Design and application of the Piezoelectric dome thin-film sensor

• Main Authors: Chin-Tien-Lin, 林志典
• Other Authors: Guo-Hua(Howard)Feng
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/04868601576868571148

碩士 === 國立中正大學 === 機械系 === 99 === This paper presents a micro-fabrication method to make a dome-shaped-diaphragm transducer (DSDT) about 50 MHz frequency. The DSDT uses piezoelectric PZT film to generate acoustic waves, and is fabricated on a silicon substrate. It is followed by applying wax to the module formed by various sized balls and the fabricated silicon frame so that the diaphragm curve-adjustable mold of the transducer is ready.Taking out the balls, depositing parylene, and removing wax, the dome-shaped-diaphragm is shaped. Protecting by thermally sustainable RTV, the diaphragm is baked with PZT solution and the PZT - based dome-shaped-diaphragm after curing process is complete. The developed transducers possess self-focus ability and can be mass-produced with low cost. Piezoelectric lead zirconate titanate ( PZT ) thin films have been prepared by a low temperature sol-gel method and characterized by x-ray diffraction. The more match with ideal PZT XRD orientation, the transducers has the more high piezoelectric effect. Results show (110)、(111)、(200) orientations match with ideal PZT XRD.