| Summary: | 碩士 === 元智大學 === 電機工程學系 === 98 === Because of low resistivity and high transmission characteristic , therefore TCO is always used for Optoelectronic Devices .The common methods of TCO are Evaporation、sputter、Chemical Vapor De- position and the sol- gel .
To mand Indium-Tin Oxide(ITO) by evaporation , It has advanta- ges of film thickness、low resistivity and high transmission ,but it also has disadvantage of expensive equipment and long time of process .How to reduce cost and decrease process time are two important topics .
In this experiment , We made TCO by sol-gel . Then we found that the SnCl2 dopes under 16wt% , and use 500℃ to anneal thickness 2500Å in 15 minutes , then the resistivity is 11Ω and the transmission is 80% , It is the best optical and electrical characteristics .
The way use in process of LED , at As type , when input current is under 50mA , the brightness is bigger than use evaporation method of ITO , but if use the process in bonding process , the LED will have a serious peeling issue .
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