Radio frequency sputtering fabrication and oxygen-vacuum annealing treatment of manganese-cobalt-zinc oxide electrodes for electrochemical capacitors

• Main Authors: Jhang-Hao Jhan, 詹張灝
• Other Authors: Chuen-Chang Lin
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/99451145793361355567

碩士 === 雲林科技大學 === 化學工程與材料工程研究所 === 98 === Characteristics of electrochemical capacitors include higher energy density, higher power density, and longer life cycle. They can be applied in 3C (Computer, Communication, Consumptive electronic product) and the quality, reliability and cost competition advantage of 3C products can be improved. Thus their manganese-cobalt-zinc oxide electrodes will be sputtered by radio frequency (RF), in this study. First, in order to increase adhesion of manganese-cobalt-zinc oxide thin films with different substrate temperatures and bias voltages. Next, will be annealed by oxygen-vacuum treatment with different annealing temperatures. Finally, the electrodes will be tested by XRD, FE-SEM, AFM, XPS, and scratch testing, etc.. In addition, in order to find better sputtering conditions (substrate temperature and bias voltage) and oxygen-vacuum annealing temperature conditions, the cyclic voltammetry (CV) will be taken for the electrodes.