| Summary: | 碩士 === 大同大學 === 機械工程學系(所) === 98 === In Micro-Electro-Mechanical Systems, electro-thermal actuator is the power of the device. In order to improve the performance of the device, the researchers try to apply the optimization method or a new design approach to change the design. Two hot arms electro-thermal actuator is adapted from the traditional one hot arm electro-thermal actuator for increasing the tip deflection and force output.
There are some studies in design optimization of one hot arm electro-thermal actuator, but no research of optimization of two hot arms electro-thermal actuator is found. In this study, the differential evolution is integrated with commercial finite element program ANSYS for design optimization of two hot arms electro-thermal actuator. First, the one hot arm electro-thermal actuator is investigated and the optimal result is compared with the reference to verify that the architecture and the optimization method used in this study are capable and feasible for optimization of one hot arm electro-thermal actuator. Then same architecture and method are applied to optimize the two hot arms electro-thermal actuator for finding the best dimension of the device. From the comparison of results of the optimum solution this study and the design in the reference, the tip deflection of reference design was increased by more than two times using optimization architecture of this study.
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