Fabrication of Zinc Oxide Thin Film Transistors by Atomic Force Microscopy Local Anodic Oxidation
碩士 === 大同大學 === 光電工程研究所 === 98 === Zinc oxide (ZnO) thin film transistors (TFTs) were fabricated by atomic force microcopy (AFM) local anodic oxidation (LAO) technology. We deposited the zinc (Zn) thin film on a substrate and operated the AFM at room temperature to fabricate this TFT. When applying...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54178487818383169653 |