Fabrication and Application on Nanoscale Tip of Metallic Probe for Atomic Force MicroscopyFabrication and Application on Nanoscale Tip of Metallic Probe for Atomic Force MicroscopyFabrication and Application on Nanoscale Tip of Metallic Probe for Atom

碩士 === 東南科技大學 === 機電整合研究所 === 98 === This paper proposes a fabrication process of stainless steel conductive probe for Atomic Force Microscopy (AFM). Generally commercial AFM probe is made by doping or coating. The shortcomings of commercial Si probe include high cost, low conductivity and can not r...

Full description

Bibliographic Details
Main Authors: Chung-ming Chen, 陳宗民
Other Authors: Jen-Chin Huang
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/74383240901073075309