Fabrication and Application on Nanoscale Tip of Metallic Probe for Atomic Force MicroscopyFabrication and Application on Nanoscale Tip of Metallic Probe for Atomic Force MicroscopyFabrication and Application on Nanoscale Tip of Metallic Probe for Atom

• Main Authors: Chung-ming Chen, 陳宗民
• Other Authors: Jen-Chin Huang
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/74383240901073075309

碩士 === 東南科技大學 === 機電整合研究所 === 98 === This paper proposes a fabrication process of stainless steel conductive probe for Atomic Force Microscopy (AFM). Generally commercial AFM probe is made by doping or coating. The shortcomings of commercial Si probe include high cost, low conductivity and can not re-sharpening when the tip was blunt, and the metallic AFM probe include low cost, high conductivity and easy re-sharpening when the tip was blunt. In this study, we utilize the combining WEDM and electrochemical etching to produce nano-scale tip of stainless steel AFM probe. In this work, we use electrochemical etching to produce nanoscale metallic AFM probe, and experiment the different process affect for stainless steel probe and find the best way to fabrication of nanoscale tip of metallic probe for AFM. And the experiments of nano-oxidation (NO) and nano electrical discharge machining (NEDM) were carried out to study the application on NO and NEDM by metallic probe.