The microstructure and mechanical properties evaluation of pulsed DC magnetron sputtered nanocomposite Zr-Si-N thin films
碩士 === 東南科技大學 === 機電整合研究所 === 98 === The ZrN thin films have been widely applied to surfaces of molding tools to prolong their service life due to their excellent mechanical properties. In this study, an asymmetric bipolar DC reactive magnetron sputtering method was adopted to deposit Zr-Si-N thin f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82705130048198490878 |