Optomechatronics: Laser Doppler Interferometer and Its Applications in MEMS Devices
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 98 === Laser Doppler vibrometer/interferometer has become the most widespread used instrucment in the measurement of the displacement and speed. As the fast devel-opment of the micro-mechanical and electrical systems (MEMS), the demands of the related non-contact ty...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79107274471915798255 |