Assessment of Energy-saving Strategies for Clean Rooms

• Main Authors: Din-Yao Jheng, 鄭鼎耀
• Other Authors: 施陽正
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/n64ccf

碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 98 === Cleanrooms in high-tech fabs are commonly applied to meet the stringent requirement of high cleanliness processing environment. Heating, ventilating, and air-conditioning (HVAC) system is therefore remarkably utilized to control the indoor temperature and relative humidity of cleanroom within narrow ranges. The HVAC system accounts for 60% of the annual total energy usage in the high-tech fabs, and the recirculation air system in cleanroom may make up to 25% of the total energy usage in HVAC system. The knowledge of efficient management on energy usage is essential in parallel with the growing focus on energy conservation and building electricity utility rating systems in recent years. Thus, proper design of HVAC system for high-tech cleanrooms is essential. This study aimed to investigate the optimum HVAC system design to meet the stringent requirements of high-tech cleanroom with minimum energy consumption based on two case studies. For Case 1, numerical assessments were conducted to study the feasibility of variation on operating parameters of ventilation system in high-tech cleanrooms for potential energy conservation. The potential energy use of ventilation system were evaluated based on several criteria, such as humidification methods applied in outdoor make-up air unit (MAU), temperature of supply air, area coverage of fan filter units (FFUs), and supply air velocity. For Case 2, comparison of the annual energy consumption of two different air recirculation system for a cleanroom with wall-return air recirculation system and fan dry coil unit air recirculation system was included.