The Study of YBCO Thin Films Fabricated by Ultrasonic Spray Pyrolysis

• Main Authors: Sheng-Chun Peng, 彭聖鈞
• Other Authors: 王耀德
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/6978p8

碩士 === 國立臺北科技大學 === 光電工程系研究所 === 98 === In this study, two-step and one-step, processes were employed to fabricate YBCO superconducting thin films. Y-Ba-Cu-O thin films were deposited on inexpensive LiNbO3 by using ultrasonic spray technique. First, nitrate solution which includes yttrium nitrate, barium nitrate and copper nitrate was dissolved in DI water. Then, ultrasonic spray system was employed to deposit precursor on the LiNbO3 substrates. Finally, the as-deposited samples were reacted in furnace. The different experiment parameters, reacting atmosphere and reacting temperature, were optimized by XRD、SEM and four-probe measurements results. In two-step process, the reacting atmosphere and reacting temperature affects the YBCO crystalline structure. The 80-min reacting time in argon and the 930℃ reacting temperature had the best result of XRD, R-T and SEM. In one-step process, In the analysis discovered from XRD that will have other compound production in the elevation of temperature process. As reacting time goes up, it helps YBCO grow along the c-axis. The R-T measurement shows that thin films have transition-curve. In this study, Y-Ba-Cu-O thin films were grown on LiNbO3 by using ultrasonic spray pyrolysis with superconducting transition.