Studies on the properties of aluminium oxide and aluminium oxide doped zinc oxide thin film for photovoltaic applications

碩士 === 東海大學 === 物理學系 === 98 === In this thesis, we employ a aluminum oxide thin film as passivation layer、buffer layer and moisture degradation, and use AZO thin film as TCO for solar cells. we are focus on analyzing aluminum oxide and AZO properties. First, we use RF system sputtering aluminum oxid...

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Bibliographic Details
Main Authors: Chi-Yu Chen, 陳紀羽
Other Authors: Hsi-Lien Hsiao
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/34463484881470744012