Study and Fabrication of Optically Chemical Sensors with Multi-Layered Porous-Si Structures
碩士 === 南台科技大學 === 光電工程系 === 98 === Abstract Owing to its high sensitivity of electric, chemical and physical properties to outer environments, porous silicon (PS) is also an important material for development of chemical sensors. And in the part of multi-layered porous-Si (MLPS) structures such as B...
Main Authors: | Chen-Yi Huang, 黃琛壹 |
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Other Authors: | Kuen-Hsien Wu |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/46162692799346825615 |
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