| Summary: | 碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 98 === Silver conductive thin films are deposited on glass and polyimide substrates by using inkjet printing and sputtering. Before thin film deposition, the substrate surfaces are treated by oxygen plasma with 6.8, 10.5, and 18 W, respectively. Some major characteristics of the deposited thin films are investigated, including optoelectric properties, residual stresses, adhesion, and mechanical properties.
The results show that, in mechanical properties, the hardness and Young’s modulus of the thin films increase as the oxygen plasma power increases; the residual stress decreases from tensile to compressive as the plasma power increases; moreover, the adhesion force can be double by the surface treatment. In optical property, the sputtered silver thin films have 95% reflection, but the printed thin films are less. In electric property, the plasma surface treatment also effectively decreases the sheet resistance of the silver thin films.
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