High Speed Grinding Small Angle Micro Probe

• Main Authors: Mei-Xin Hung, 黃眉欣
• Other Authors: 黃俊德
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/976kf7

碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 98 === In response to the characteristics of different probe material, this experiment used a processing method which was not affected by any material properties, to make the probe achieve micron level and facilitate more accurate measurement. This paper used multiple pneumatic grinding spindles to combine with micro cutting-edge technology, and applied to palladium alloy, pure tungsten, and zirconium oxide. By this system, with the experiment which chose the 25μm and 5μm granularity of diamond grinding wheels, with 32,000rpm, 50,000rpm, and 53,000rpm of rotation speeds, and the 13°and 10°of the offset grinding angle between grinding wheel and bar to grind out three grinding parameters of micro sophisticated probes, which were granularity, rotation speed, and the offset grinding angle of grinding wheel and bar, respectively. By this system, it could also grind out various shapes probes, such as cone, cylinder and disc. From the experimental results, it could be known that the big angle of grinding, high rotation speed, and small granularity could grind out better micro sophisticated probes; and by adding the cutting agent during the grinding process could reduce the chip interference and increase the success rate of grinding out micro sophisticated probes. Therefore, the experiment could grinding out the 0.62μm of cone-shaped probe by using the 5μm granularity of diamond grinding wheel, with 50,000rpm of rotational speed and 13°of grinding angle; it could also make 66.0μm diameter of cylinder and 56.0μm thickness of the disc-shaped.