Micro-electroplating process and the production of holographic interferometry grating components on the D-shaped metal film

碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 98 === This study is to proposes by using electroplating process technology and holographic diffraction gratings interference technology to design the grating structure on polymer material, and then sputtering process using a conductive layer to coat the metal...

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Bibliographic Details
Main Authors: Yi-Fong Chen, 陳羿峰
Other Authors: 何智廷
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/4ndju4
Description
Summary:碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 98 === This study is to proposes by using electroplating process technology and holographic diffraction gratings interference technology to design the grating structure on polymer material, and then sputtering process using a conductive layer to coat the metal thin film on the grating structure. LIGA-like process was need by electroplating molding process to fabricate D-Shape fiber metal grating,, Through a different process, the grating depth of D-Shape fiber become shallow . Atomic force microscopy studies (AFM), scanning electron microscopy (SEM) and optical measurements were used to observe and record the results of experiments. Through the analysis of experimental results, it show that this method not only can obtain the metal protective layer, also can increase the sensitivity of fiber grating.