The Synthesis and Oxygen Plasma Treatment of AlSiN Thin film
碩士 === 國立虎尾科技大學 === 材料科學與綠色能源工程研究所 === 98 === There are two phases in this study. In phase one, Nano-composite Al-Si-N films have been deposited on Si wafer and cemented carbide substrates using Al1-xSix alloy targets with different Si contents by a reactive unbalanced magnetron sputtering system....
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/e85493 |