Fabrication of Planer Polymer Waveguide Bragg Reflector Device

• Main Authors: Chin-Yi Kuo, 郭晉譯
• Other Authors: 莊為群
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/w37gs8

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 98 === In this thesis, we proposeda novel process, which incorporates with the photolithography and soft molding techniques, to fabricate Bragg reflection devices. Such devices are based on the planar polymer optical waveguides. For the Bragg reflection grating fabrication, the stamping transfer technique, incorporated with holographic interference technology, was used to transfer the grating from soft rubber mold to the OG polymer mold. Furthermore, we use the PDMS mold, being with the grating on it, and the UV epoxy to fabricate the planar type Bragg reflection waveguide devices. Use soft molding techniques to fabricate the low loss polymer optical waveguides and Large Scale production. The optical transmission characteristics were measured in terms of optical spectrum analyzer (OSA). The grating profiles of the devices were observed using SEM and AFM system.