Characteristics of pulsed DC reactive magnetron sputtered nanocomposite Cr-Zr-N and Cr-Zr-Si-N thin films

• Main Authors: Shih-Tien Chang, 張詩典
• Other Authors: Chaur-Jeng Wang
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/14683679469864220269

碩士 === 國立臺灣科技大學 === 機械工程系 === 98 === The chromium nitride thin film have a good mechanical properties and oxidation resistance. but the drawback is the slightly lower hardness then other hard coatings. the concept of nanocomposite thin films is employed by adding silicon and zirconium to enhanced microstructures, mechanical properties and corrosion resistance, In this study, The Cr-Zr-N and Cr-Zr-Si-N thin films with various Zr contents ranging from 0.49 at.% to 13.58 at.% were deposited by a bipolar asymmetric pulsed DC reactive magnetron sputtering system. The columnar structure and grain size refinements and the mechanical properties enhancements were observed due to the addition of 6.98 at.% Si to the Cr-Zr-N coating. A texture evolution was observed when the Zr contents of Cr-Zr-Si-N film increased. The hardness increased with increasing Zr contents in the Cr-Zr-Si-N coatings. The Cr-Zr-Si-N coatings with 10.42 at.% Zr content exhibited a combination of high hardness, based on the scratch adhesion strength test results, the adhesion properties of Cr-Zr-Si-N coatings deposited on tool steels are decreased with increasing Zr. The corrosion resistance was analyed by using the potentiostat in 3.5 wt.% NaCl aqueous solution. and the corrosion resistance of the thin films was improved as the Zr content increased. According to the oxidation tests at 850oC,after the annealing test, It is found that volume of thin film increased with increasing Zr contents, In general, the high temperature oxidation resistance of Cr-Zr-Si-N coatings decreased with increasing Zr.