Intelligent Control for Linear Piezoelectric Ultrasonic Motor and Micro-Nanometer Alignment System Using Machine Vision
博士 === 國立臺灣科技大學 === 機械工程系 === 98 === This paper proposes three intelligent precision control algorithms for overcoming the drawbacks of serious hysteresis behavior and highly nonlinear property for the dual-axes linear piezoelectric ultrasonic motor. The proposed control methods include the two-stag...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98106412577827927031 |