Development and Study of Nanopowder Imprint Technology for Replication of Flexible Micro-Optical Components

• Main Authors: YONG-CHENG WONG, 翁永承
• Other Authors: Jiunn-Yih Lee
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/16536551833862417095

碩士 === 國立臺灣科技大學 === 高分子系 === 98 === Since the electro-optic technology is developing vigorously, the design of electronic products is becoming more compact, such as DVD players and digital cameras. In order to achieve smaller size and lighter weight, micro elements need to be developed, such as microlens arrays and diffractive optical elements. Microlens arrays are among the most widely used optical components, which are used in display components, optical sensors, wireless communication, and optical fiber communication. Conventional production technologies can no longer meet the demand for producing precise micro elements, thus, a replication molding technology for mass production of precise micro components is urgently needed. This study developed creative imprinting technology, combining nano-imprint lithography and array-type UV-curing technology. It used nanopowders as the method to transmit imprint force, and integrated technical features, such as soft lithography, light-curing resistant and gas-assisted imprint technology, in order to study the development of technological processes of micro-lens array manufacturing, and mature the application and technology of nano-imprinting. According to research results, SUS 304 stainless steel sheet with a micro-hole array could be smoothly fabricated into an original micro-lens array mold upon gas-assisted micro-hot embossing. At the same time, a micro-lens array structure with a complementary external form could be precisely remolded and reproduced by PDMS. Complete molding of micro-lens could be effectively achieved by combining imprints of gas-assisted lithography developed in this study, and even UV-NIL. The effective imprinting area and reproducibility of transfer printing could be greatly improved when a micro-lens contacts perfectly with a substrate surface. Moreover, since PDMS soft molds have short remolding times, and are easily feathered during manufacturing, production costs could be effectively reduced through features such as, low surface free energy, resistant to adhering to the mold during imprinting, and collocation of gas-assisted nanopowder imprinting of micro-structural processes.