Fabrication and Characterization of BaTiO3 film prepared by RF magnetron sputtering

博士 === 國立臺灣科技大學 === 工程技術研究所 === 98 === 200-nm-thick La- and Sm-doped BaTiO3 thin films with A/B ratio of unity fabricated by magnetron sputtering on the Pt/Ti/SiO2/Si substrate have been characterized. The effects of post-annealing and the amount of dopant on structure and electrical properties were...

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Bibliographic Details
Main Authors: Cheng-Hui Wu, 吳政惠
Other Authors: Jinn P. Chu
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/00584717697897204865