Synthesis of MFI Zeolite Mesoporous Low-k Films Using Poly (ethylene oxide)-based Surfactants as Template
碩士 === 臺灣大學 === 化學工程學研究所 === 98 === The synthesis of coating solutions with pure-silica-zeolite (PSZ) of MFI structure for low-k (dielectric constant) films applications was reported a few years ago. Although the k values can be around 2, the morphology of the films was poor. In order to solve this...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04665508035151122344 |