The investigation of photonic crystal UV-waveguide fabricated by E-beam nano lithography
碩士 === 國立臺灣海洋大學 === 光電科學研究所 === 98 === The purpose of this thesis is to use E-beam lithography to fabricate 2D photonic crystal waveguide which can propagate ultraviolet. First plane wave expansion method (PWE) is used to simulate the characteristics and band structure of photonic crystal waveguide....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40602676544578068703 |