| Summary: | 碩士 === 國立臺灣師範大學 === 工業教育學系 === 98 === In this paper, we try to obtain crystalline texture within ZnO under room temperature with different electrical field and current. We fabricate ZnO thin film on glass substrate on which aluminum electrodes are evaporated by Sol-Gel spin coating technique at first. Then all specimens are divided into three sets which are respectively treated with different experimental design method for following observation (1) How to improve the quality of ZnO thin films by applying electrical field on them under room temperature. (2) The comparison of applying electrical field over ZnO thin films under different annealing temperatures (3) the effect of electrode which conducts electricity to ZnO thin films. Finally, specimens with different experimental parameters, such as voltages, forward or negative bias and time of applying voltage are investigated with SEM(Scanning Electron Microscope), XRD and XPS. After analyzing experimental results, we know that applying electrical field of different magnitudes over ZnO thin films apparently changes the micro-structure and characteristics of ZnO thin films after annealing as experimental time increases. Besides, that metal layer heats up due to electromigration changes the micro-structure and crystalline texture of ZnO thin films surface.
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