The implementation of magnetic microactuator and its integration with capacitive sensing unit design

The implementation of magnetic microactuator and its integration with capacitive sensing unit design

碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 98

Bibliographic Details
Main Authors:	Lin, Tzu-Yu, 林孜育
Other Authors:	Fang, Weileun
Format:	Others
Language:	zh-TW
Published:	2010
Online Access:	http://ndltd.ncl.edu.tw/handle/73673597912415420628

Similar Items

Design and Fabrication of an Efficient Magnetic Microactuator
by: Ko Chun-Hsu, et al.
Published: (2003)

The Magnetic Membrane Microactuator
by: Shihi Yi Wen, et al.
Published: (2000)

Micromachined components as integrated inductors and magnetic microactuators
by: Ahn, Chong Hyuk
Published: (2007)

The Design and Fabrication of Polymeric Microactuator
by: Ming-Tsung Lin, et al.
Published: (2003)

Magnetic Shape Memory Microactuators
by: Manfred Kohl, et al.
Published: (2014-11-01)

Design, Simulation and Experimental Study of the Linear Magnetic Microactuator
by: Hanlin Feng, et al.
Published: (2018-09-01)

Integration of shape memory alloy for microactuation
by: Abuzaiter, Alaa A. H.
Published: (2016)

Thermally Actuated Bimorph Microactuators
by: Yuh-Sheng Lin, et al.
Published: (1996)

A Constrained GA for Electro-Thermal Microactuator Design
by: Po-Hung Lin, et al.
Published: (2011)

Design and Characterization of In-Plane Piezoelectric Microactuators
by: Javier Toledo, et al.
Published: (2017-06-01)

Design and Fabrication of the Novel Piezoelectric Microactuator
by: Jing Chen, et al.
Published: (2012)

Development of Microactuators Based on the Magnetic Shape Memory Effect
Published: (2013)

Analysis and Fabrication of Microgripper with Electrothermal MicroactuatorAnalysis and Fabrication of Microgripper with Electrothermal MicroactuatorAnalysis and Fabrication of Microgripper with Electrothermal Microactuator
by: Wan-Chi Chang, et al.
Published: (2007)

Microactuators for Powerful Pumps
by: Bodén, Roger
Published: (2008)

Cooperative Microactuator Systems
Published: (2023)

Design and Fabrication of Optical Switch with Piezoelectric Microactuator
by: Wen-Kai Fan, et al.
Published: (2008)

Analysis and Design of a Novel PZT Microactuator
by: Ing-Jye Lian, et al.
Published: (2003)

Design and Fabrication of Topology Optimal Miniature Microgripper Integrated with an Electro-Thermal Microactuator
by: Chen Wei Liang, et al.
Published: (2006)

Design and Analysis of Optical Switch Integrated with Out-of-Plane Electro-Thermal Microactuator
by: Wen-Zhe Chang, et al.
Published: (2006)

Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators
by: Teichert, Kendall B.
Published: (2008)

Design and Evaluation of a Multi-degree-of-freedom Piezoelectric Microactuator and its Applications
by: Sheng-Chih Shen, et al.
Published: (2013-11-01)

The Application of Fe-Ni-Cr/InvarBimetal Membrane on Microactuators
by: Yu-Jung Hsu, et al.
Published: (2003)

Synthesis and Device Fabrication of Cu/Ni Nanocomposite for Low Power Magnetic Microactuation
by: Yu-Wen Huang, et al.
Published: (2006)

Integration and Implementation of CMOS-MEMS z-axis Microaccelerometer and Capacitive Sensing Circuits
by: Lin, Chia-Wei, et al.
Published: (2010)

Research on a Piezoelectric Microactuator
by: Wen-Chieh Cheng, et al.
Published: (2003)

Light driven microactuators : design, fabrication, and mathematical modeling
by: Han, Li-Hsin
Published: (2011)

Structural Design and Thermal Analysis of Electro-Thermal Microactuator
by: 江欣怡
Published: (2004)

Analysis and Design of a Semiconductor Electro-Thermal Microactuator
by: Chi-Kang Chan, et al.
Published: (2003)

Optimal Parameter and Tolerance Design for an Electro-thermally Microactuator
by: Justice Huang, et al.
Published: (2003)

Design and Optimal Control of a Multistable, Cooperative Microactuator
by: Michael Olbrich, et al.
Published: (2021-08-01)

Multiobjective Technique in Constraints Handling GA for Electro-Thermal Microactuator Optimization
by: Yu-De Su, et al.
Published: (2011)

Design and implementation of a capacitive measurement circuit with application to integrated micromotor position sensing
by: Leip, David G. (David Gary)
Published: (2007)

Fabrication Processing of Cantilever Microactuator Using PZT Thin Film
by: Shu-Huie Lin, et al.
Published: (1999)

Thermal Microactuators for Microelectromechanical Systems (MEMS)
by: Cragun, Rebecca
Published: (2003)

Fabrication of Piezoelectric Thick-film Microactuator
by: HSIEH JEN HEI, et al.
Published: (2002)

Fabrication and characterization of Nafion based microactuators.
Published: (2003)

Sequential Approximate Optimization Method with Kriging Model for Optimal Design of Microactuator
by: Chen-Chi Wu, et al.
Published: (2006)

Design and Fabrication of An Electro-Thermal Microactuator with Multi-Lateral Motion in Plane
by: Yi-Kun Chen, et al.
Published: (2004)

Deposited PZT film for microactuators using a hydrothermal method
by: 林宏展
Published: (2007)

Electrostatic microactuator control system for force spectroscopy
by: Finkler, Ofer
Published: (2010)

Cannot write session to /tmp/vufind_sessions/sess_j7bacmh04e3g6i8u3guqes1cc7