On the Hydrodynamic Coupling Effect of Microstructures
博士 === 國立清華大學 === 奈米工程與微系統研究所 === 98 === The dynamic behavior of microelectromechanical systems (MEMS) devices is closely related to their energy losses during their operations. As MEMS devices operate at atmospheric pressure, air damping is the dominant factor for energy loss. Therefore, it is very...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96555070121425498484 |