Design and Fabrication of a Novel Micro-spring for Capacitive Force Sensor Applications

Design and Fabrication of a Novel Micro-spring for Capacitive Force Sensor Applications

博士 === 國立清華大學 === 動力機械工程學系 === 98

Bibliographic Details
Main Authors:	Chuang, Chieh-Tang, 莊介棠
Other Authors:	Chen, Rongshun
Format:	Others
Language:	en_US
Published:	2010
Online Access:	http://ndltd.ncl.edu.tw/handle/10984219229977501232

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