Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface

碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 98 === This study uses an magnetohydrodynamics (MHD) model to simulate unsteady one-dimensional transport variables in argon plasma, under low pressure and weak ionization between two planar electrodes suddenly biased by a negative voltage or electric field. Plasma...

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Main Authors:	Chun-Peng Chang, 張鈞芃
Other Authors:	Wei, Peng-Sheng
Format:	Others
Language:	zh-TW
Published:	2010
Online Access:	http://ndltd.ncl.edu.tw/handle/12629664280576985452

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spelling	ndltd-TW-098NSYS54900352015-10-13T18:39:45Z http://ndltd.ncl.edu.tw/handle/12629664280576985452 Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface 非穩態電漿電子與離子在近工件表面之行為 Chun-Peng Chang 張鈞芃碩士國立中山大學機械與機電工程學系研究所 98 This study uses an magnetohydrodynamics (MHD) model to simulate unsteady one-dimensional transport variables in argon plasma, under low pressure and weak ionization between two planar electrodes suddenly biased by a negative voltage or electric field. Plasma has been widely used in etching, ion implantation, light source, and nuclear fusion, etc. Studying transport processes of plasmas therefore is important. Ignoring magnetic field, collisions between ions and electrons, the computed results in this work shows density, velocity, voltage, electric field, energy and temperature transport phenomenon in different cases. The results give insight by theory and simulation the surfaces behavior in plasma. Keywords: magnetohydrodynamics (MHD), transport variables in sheath,space charge Wei, Peng-Sheng 魏蓬生 2010 學位論文 ; thesis 34 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 98 === This study uses an magnetohydrodynamics (MHD) model to simulate unsteady one-dimensional transport variables in argon plasma, under low pressure and weak ionization between two planar electrodes suddenly biased by a negative voltage or electric field. Plasma has been widely used in etching, ion implantation, light source, and nuclear fusion, etc. Studying transport processes of plasmas therefore is important. Ignoring magnetic field, collisions between ions and electrons, the computed results in this work shows density, velocity, voltage, electric field, energy and temperature transport phenomenon in different cases. The results give insight by theory and simulation the surfaces behavior in plasma. Keywords: magnetohydrodynamics (MHD), transport variables in sheath,space charge
author2	Wei, Peng-Sheng
author_facet	Wei, Peng-Sheng Chun-Peng Chang 張鈞芃
author	Chun-Peng Chang 張鈞芃
spellingShingle	Chun-Peng Chang 張鈞芃 Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface
author_sort	Chun-Peng Chang
title	Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface
title_short	Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface
title_full	Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface
title_fullStr	Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface
title_full_unstemmed	Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface
title_sort	unsteady behavior of electrons and ions in plasmanear a surface
publishDate	2010
url	http://ndltd.ncl.edu.tw/handle/12629664280576985452
work_keys_str_mv	AT chunpengchang unsteadybehaviorofelectronsandionsinplasmanearasurface AT zhāngjūnpéng unsteadybehaviorofelectronsandionsinplasmanearasurface AT chunpengchang fēiwěntàidiànjiāngdiànziyǔlízizàijìngōngjiànbiǎomiànzhīxíngwèi AT zhāngjūnpéng fēiwěntàidiànjiāngdiànziyǔlízizàijìngōngjiànbiǎomiànzhīxíngwèi
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Unsteady Behavior of Electrons and Ions in PlasmaNear a Surface

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