Study on Electrical and Mechanical Characteristics of Flexural Plate Wave Device
碩士 === 國立中山大學 === 電機工程學系研究所 === 98 === Acoustic micro-sensors have already been applied in mass sensing including surface acoustic wave (SAW), flexural plate wave (FPW), thickness shear mode (TSM) and shear horizontal acoustic plate mode (SH-APM). The FPW micro-sensor is very suitable for liquid...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24376538895728302600 |