| Summary: | 碩士 === 國立中山大學 === 電機工程學系研究所 === 98 === Diamond-like carbon (DLC) film exhibits an extreme hardness, low friction coefficient, chemical stability, heat conductivity, high resistance, and high optical transparency. There properties lead to remarkable applications such as protective and anti-reflection coating, wear resistant overcoat and biocompatible coatings. In this study, Diamond-like carbon films were deposited by electrodepsoition technique, and the deposition parameters include DC potential, deposited temperature, the concentration of electrolyte were varied to study the characteristics, microstructure and the composition of DLC film. In addition, the optimizing deposition was revealed and discussed in detail.
The Diamond-like carbon film were deposited by electrodepsoition technique onto the ITO glass substrates, and the deposition conditions were preset in the range as the applied voltage from 50V and 250V, low deposition temperature within 35℃to 50℃ and a mixture of acetonitrile and deionized water with the concentrations of acetonitrile between 0.2% and 3.2%.
Scanning electron microscopy can make an insight into the surface morphology also to reveal the uniformity of the DLC films. For the I-t curves of DLC film growth, it can be used to study of the growth mechanism by correlation the surface morphology observed by Scanning electron microscopy (SEM). The transmission, refraction index and optical band gap of DLC film was measured by the N &K analyzer. Finally, the hydrogen content, composition and microstructure of DLC films were characterized by the FTIR and XPS analyze
In experimental work, the properties of DLC film obtained depends on a verity of growth parameters such as applied voltage, the concentration of electrolyte and deposition temperature. With the increase of the applied voltage, it increases with the growth rate of deposited films. That was also observed in the increase of concentration and temperature. As increase the film’s thickness, the film surface becomes to the light yellow brown color, and which also causes to increase the refractive index, decrease the transmission rate, reduce the optical band gap, and decrease the amount of C-H bond and the C-N bond increase simultaneously.
According to above results, DLC film deposited using the electrolyte of acetonitrile was more suitable used for coating on Si –based optoelectronic devices such as solar cell to be a protective layer and/or anti-reflection layer.
Additionally, for the nitrogen doing in DLC film, it can increase the adhesion and the friction of film to utilize for mechanic industry and to develop as the window layer of solar cells. Although there are few N-content incorporated in the DLC film, and that limits its applications. However, it still has a high potential used for solar cells and leads to advanced study in the future.
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