Modeling and Analysis of a Triaxial Microaccelerometer with Piezoelectric Thin-Film Sensing Using Energy Method
碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 98 === This study presents the system modeling of a triaxial microaccelerometer consisted of a quadri-beam suspension, a seismic mass, and displacement transducers using piezoelectric thin films. Both suspension beams support two ends of the seismic mass fabricate...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39435874198371570891 |