Fabrication and properties of titanium dioxide based humidity sensorFabrication and properties of titanium dioxide based humidity sensorFabrication and properties of titanium dioxide based humidity sensor
碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 98 === In environmental control, humidity detection is very important. In particular, precise humidity detection is necessary in the industry of high technology and manufacturing industries. Therefore, the sensors changed the structure to improve the sensing effect...
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| Format: | Others |
| Language: | zh-TW |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77449212040083603282 |
| Summary: | 碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 98 === In environmental control, humidity detection is very important. In particular, precise humidity detection is necessary in the industry of high technology and manufacturing industries. Therefore, the sensors changed the structure to improve the sensing effect. In this study, the humidity sensors were produced by using the RF sputtering. TiO2 films as sensing membranes of the humidity sensor. Interdigital electrode was produced by thermal evaporation system. This thesis fabricates two kinds of sensor structure devices including Al/TiO2/Si (MOS), TiO2/Al/TiO2/Si (OMOS). The response time for these sensor are 120s and 50s respectively. The TiO2 thin film were prepared at growth temperature of 400℃, it shows improvement to the hysteresis and response time of sensors. The recovery time required about 30 seconds in the range of 90%-30% RH at 27℃.
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