Optical and Structural Properties of ZnO Epitaxial Films Growth at Low Temperature by Atomic Layer Deposition
碩士 === 國立新竹教育大學 === 應用科學系碩士班 === 98 === In this study, epitaxial ZnO were grown on c-plane sapphire and m-plane sapphire substrate by atomic layer deposition (ALD) with diethylzinc (DEZn) and deionized water (H2O) as the precursor. This dissertation is divided into two parts. In the first part, the...
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| Format: | Others |
| Language: | zh-TW |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86068535958145767686 |