Study of the ZnO thin films by DC magnetron sputtering
碩士 === 國立東華大學 === 材料科學與工程學系 === 98 === We prepared ZnO thin films by arsenic/gallium co-doping using DC magnetron sputtering. The effects of the Ar gas flow, DC power, Ar/O2 gas ratio, and annealing on the structural and optical properties of ZnO films will be investigated. A magnetron is used in or...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/67693349171312325418 |