Research of the nano-sphere lithography for the surface texture on the silicon solar cells

• Main Authors: I-ting Shih, 施怡婷
• Other Authors: Cheng-chung Lee
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/00437510781209883528

碩士 === 國立中央大學 === 光電科學研究所 === 98 === In this research, we discussed the influence of the absorption light path length entering the solar cells by the surface texture on the silicon solar cells. On the single crystalline silicon wafer, this research used nano-sphere lithography by plasma etching to construct the nano-cylinders structure. After that, we used the ion source to bombard the nano-cylinders in order to alter the surface topography and also used the sputtering system to sputter a layer of AR-coating on the surface. This AR-coating can decrease the surface reflectance which results in the increasing luminous flux that improves the absorption path length of light. Finally, we discussed the impact on the optical properties by changing the width of structures. It can be discussed the effects of the surface topography or the different width structures by measuring the reflectance, transmittance, and the scattering of the nano-cylinders. Low reflectivity can decrease the loss that caused by the reflection. And, the haze parameter is proportional to the absorption path length of light entering the solar cells. Experimental results showed the highest haze parameter from the pacifier shape at the top of nano-cylinders by additional ion etching. Then, the GZO AR-coating on nano-cylinders can decrease surface reflection about 20%, and the nano-cylinders have low reflection at different angle. Finally, the nano-cylinders of 337 nm in width forming from the nano-spheres of 300 nm in diameter show the best result.