Characteristics of Raman Spectra of Hydrogenated Amorphous Carbon Films
碩士 === 國立中央大學 === 光電科學研究所 === 98 === In this thesis,we use mainly the Raman spectroscopy and UV-VIS-NIR spectroscopy to study the characteristics of hydrogenated amorphous carbon thin films which are made by the Plasma Enhanced Chemical Vapor Deposition (PECVD) method. These films were made in diffe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33442263575533392714 |