Blistering in InP/InGaAs/InP p-i-n strucrure via hydrogen diffusion by atmospheric pressure plasma for Ion-Cut process
碩士 === 國立中央大學 === 材料科學與工程研究所 === 98 === Integration of InP-based materials with Si substrates has been investigated extensively in order to achieve a high performance and reduce the cost in recent years. The lattice mismatch leads the defects to appear near the interface between dissimilar materials...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81105452450800836459 |