| Summary: | 碩士 === 國立中央大學 === 化學工程與材料工程研究所 === 98 === In this study, we show the successfully fabrication of two types of anodic aluminum oxide (AAO) templates. One is the free standing AAO nanotemplate with ultra-small pore size (<10nm), and the other is the thin AAO template with 2-D periodic nanopore structure on Si substrate.
To fabricate free standing AAO nanotemplates, high purity Al foils were used as the start materials, and a two-step anodizing process was employed. In this works, the pore diameters of AAO nanotemplates can be tuned from 9 to 60 nm by varying the electrolyte composition, applied voltage, and processing temperature. The obtained AAO nanotemplates can be extended to fabricate a large amount of ultra-narrow nanowires.
The present study also demonstrated that the thin AAO templates with well-ordered nanopore arrays were successfully fabricated on (001)Si substrates by employing the nanosphere lithography technique and selective anodic oxidation process. The pore diameter and the interspacing can be readily controlled by adjusting the diameters of the colloidal nanospheres and the anodic etching conditions. After removal of the AAO templates, large-area periodic SiOx nanodots array was found to form on Si substrate. Furthermore, the hexagonally arrayed porous AAO membrane can be used as the template for fabrication of metal nanodot arrays on Si substrate. After the deposition of Ni thin films and subsequent lift-off of the AAO template, the hexagonal periodic Ni nanodot arrays were found to form on the surface of (001)Si substrate. The size of the deposited Ni nanodots were measured to be about 170 nm, corresponding to the pore size of the thin AAO template. Based on TEM and SAED analyses, it is found that the crystal structure of Ni nanodots is polycrystalline.
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